Silver, Richard M
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자료유형 | 도서 |
---|---|
서명/저자사항 | Metrology, inspection, and process control for microlithography XIX : 28 February-3 March, 2005, San Jose, California, USA/ Richard M. Silver, chair/editor ; sponsored and published by SPIEthe International Society for Optical Engineering ; cooperating organization, International SEMATECH. |
개인저자 | Silver, Richard M. |
단체저자명 | Society of Photo-optical Instrumentation Engineers. International SEMATECH. |
발행사항 | Bellingham, Wash.: SPIE, c2005. |
형태사항 | xlv, 526 p.: ill.; 28 cm. |
총서사항 | SPIE proceedings series; v. 5752, part one |
가격정보 | |
ISBN | 0819457329 |
ISSN | 0277-786X |
서지주기 | Includes bibliographical references and index. |
일반주제명 | Integrated circuits -- Inspection -- Congresses. Integrated circuits -- Measurement -- Congresses. Microlithography -- Congresses. Process control -- Congresses. |
분류기호 | 569.3 |
언어 | 영어 |
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